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Pressure-equalizing Containers to Control Contaminants Generated by Differential Pressures Or Isolated Volumes

IP.com Disclosure Number: IPCOM000062779D
Original Publication Date: 1986-Dec-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Dauerer, WP: AUTHOR

Abstract

Contamination control is essential to the production of defect- free semiconductor devices. An invention proposes to use a porous breathing material for a contained environment which will permit necessary airflow while still isolating the production devices from outside particles.

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Pressure-equalizing Containers to Control Contaminants Generated by Differential Pressures Or Isolated Volumes

Contamination control is essential to the production of defect- free semiconductor devices. An invention proposes to use a porous breathing material for a contained environment which will permit necessary airflow while still isolating the production devices from outside particles.

One area of concern in contamination control is the carrier box which protects a batch of semiconductor wafers from the external environment. This is because the plasticizer by- products from the box itself will create a haze within the container. Depending upon temperature and humidity fluctuations, the enclosed volume soon becomes saturated with the outgassing by-products. These are then inadvertently transmitted to the semiconductor product and may lead to defects.

A second non-related problem is associated with pellicle masks. These transparent membranes are positioned outside the focal plane to prevent transient particles on the photomask from printing defects. Any particles landing on the pellicle cannot create a well-defined image. However, it is possible for particles to appear under the pellicle over a period of time. W changes in temperature and barometric pressure, the isolated volume under the pellicle expands and contracts, causing a pressure differential across the enclosing sidewalls and membrane. If a microscopic hole or void should exist at the joi interfaces,...