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Gas Phase, Laser Induced Deposition of Gold Onto Polyimide

IP.com Disclosure Number: IPCOM000062785D
Original Publication Date: 1986-Dec-01
Included in the Prior Art Database: 2005-Mar-09
Document File: 1 page(s) / 8K

Publishing Venue

IBM

Related People

Baum, TH: AUTHOR [+2]

Abstract

Direct write deposition of gold onto polyimide without damage to the polyimide has been achieved from dimethyl-2,4-pentanedionato gold (III), DMG(AcAc), and its fluorinated derivatives using focused argon ion laser wavelengths. Gold was deposited onto cured polyimide using 514.5 nm light at a power density of 1.35 x 104 W/cm2 or greater. Gold lines were produced by scanning the sample through the focused laser beam. Line thickness which is adequate for thin film wiring specifications (5 mm) was readily achieved by this process. The line was heated in an oven for 30 minutes (in air) at 316 degrees C. The deposited line was 3.4 mm in high 60 mm wide and exhibited a resistivity of 10.32 mL-cm. Various line dimensions and thicknesses can be achieved and resistivities 2x bulk are common.

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Gas Phase, Laser Induced Deposition of Gold Onto Polyimide

Direct write deposition of gold onto polyimide without damage to the polyimide has been achieved from dimethyl-2,4-pentanedionato gold (III), DMG(AcAc), and its fluorinated derivatives using focused argon ion laser wavelengths. Gold was deposited onto cured polyimide using 514.5 nm light at a power density of 1.35 x 104 W/cm2 or greater. Gold lines were produced by scanning the sample through the focused laser beam. Line thickness which is adequate for thin film wiring specifications (5 mm) was readily achieved by this process. The line was heated in an oven for 30 minutes (in air) at 316 degrees C. The deposited line was 3.4 mm in high 60 mm wide and exhibited a resistivity of
10.32 mL-cm. Various line dimensions and thicknesses can be achieved and resistivities 2x bulk are common. Line widths are determined by the laser focal spot size.

Disclosed anonymously.

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