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Browse Prior Art Database

Measurement of Buried Layer Impurity Concentration

IP.com Disclosure Number: IPCOM000072867D
Original Publication Date: 1970-Oct-01
Included in the Prior Art Database: 2005-Feb-22
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

Regh, J: AUTHOR

Abstract

A nondestructive technique is employed for determining buried layer impurity concentration.

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Measurement of Buried Layer Impurity Concentration

A nondestructive technique is employed for determining buried layer impurity concentration.

From two successive minima in an interference trace may be calculated the orders:

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A series of thicknesses can now be calculated with two sets of data each (N(1) lambda(1) F(1)) and (N(2) lambda(2)F(2)). A graphical solution for d, thickness, and C, the buried concentration, can then be obtained from d(1) vs d(2) plot in which the solution occurs at d(1) = d(2), or at the intersection with a 45 degrees line.

C is found from interpolation along the curve.

A plot of C vs d(1) (d(2)) for both sets of thicknesses produces two curves which will intersect at the solution. In some cases, a solution in this coordinate system is obtained at the first point of tangency.

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