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Browse Prior Art Database

Electrolytic Agitation in Immersion Etching

IP.com Disclosure Number: IPCOM000072883D
Original Publication Date: 1970-Oct-01
Included in the Prior Art Database: 2005-Feb-22
Document File: 2 page(s) / 37K

Publishing Venue

IBM

Related People

Lasky, DJ: AUTHOR [+2]

Abstract

This technique controls agitation of an etching solution adjacent the exposed surfaces of a part being immersion etched. As shown in A the part is located above platinum wire electrode 2 in ammonium persulfate etch bath 3. Electrode 2, with second electrode 4 and source of direct current 5, forms an electrochemical system. Bubbles formed by electrolysis at electrode 2 pass in sheet formation across the masked surface 7 of part 1.

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Electrolytic Agitation in Immersion Etching

This technique controls agitation of an etching solution adjacent the exposed surfaces of a part being immersion etched. As shown in A the part is located above platinum wire electrode 2 in ammonium persulfate etch bath 3. Electrode 2, with second electrode 4 and source of direct current 5, forms an electrochemical system. Bubbles formed by electrolysis at electrode 2 pass in sheet formation across the masked surface 7 of part 1.

The uniform bubble screen creates an initially uniform turbulence over the entire part surface traversed by the bubbles. However as etch by-products develop at exposed surface areas and are carried off by the bubbles, the rate of turbulence increases at local attacked sites as shown at B. Thus the turbulence rate over sections of the part surface tends to vary in proportion to the amount of etching activity present locally in each exposed area. This effect results in more finely resolved etching patterns.

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