Browse Prior Art Database

Protective Coating for Masks

IP.com Disclosure Number: IPCOM000073394D
Original Publication Date: 1970-Dec-01
Included in the Prior Art Database: 2005-Feb-22
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Dalbo, JM: AUTHOR [+2]

Abstract

To facilitate the removal of deposited metal remaining on a mask used in a metal deposition process without altering the original tolerances of the mask, a protective coating is applied to the mask. The polymer parylene is used as the coating.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 1

Protective Coating for Masks

To facilitate the removal of deposited metal remaining on a mask used in a metal deposition process without altering the original tolerances of the mask, a protective coating is applied to the mask. The polymer parylene is used as the coating.

The mask is designed to tolerances which include the parylene coating thickness. After a metal deposition process, residual metals which change the mask dimensions are removed from the mask by chemical etching. Due to the protective coating on the mask, the possibility of over etching is eliminated.

1