Browse Prior Art Database

Transfer Apparatus

IP.com Disclosure Number: IPCOM000073458D
Original Publication Date: 1970-Dec-01
Included in the Prior Art Database: 2005-Feb-22
Document File: 3 page(s) / 51K

Publishing Venue

IBM

Related People

King, RP: AUTHOR [+2]

Abstract

In processing silicon wafers, it is often necessary to transfer wafers from one apparatus to another, the first apparatus unloading the wafers into, for example, an annular wafer carrier. In the subsequent station the apparatus is adapted to remove wafers from a linear carrier as opposed to an annular carrier. To set the wafers up for operation, the wafers must be transferred from the annular carrier to the linear carrier. Because of the delicacy of the wafers and the requirement of noncontact by an individual with the wafers, it is necessary to transfer wafers between the linear and annular carriers without human contact.

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Transfer Apparatus

In processing silicon wafers, it is often necessary to transfer wafers from one apparatus to another, the first apparatus unloading the wafers into, for example, an annular wafer carrier. In the subsequent station the apparatus is adapted to remove wafers from a linear carrier as opposed to an annular carrier. To set the wafers up for operation, the wafers must be transferred from the annular carrier to the linear carrier. Because of the delicacy of the wafers and the requirement of noncontact by an individual with the wafers, it is necessary to transfer wafers between the linear and annular carriers without human contact.

The apparatus illustrated includes a base 10 upon which is mounted an annular carrier receiver 15 which cooperates, by way of suitable slides 25, to load wafers into a linear carrier 30 (shown in phantom lines) held by a linear carrier receiver 31. The annular carrier receiver is adapted for receiving an annular carrier 12 and for indexing periodically to permit a group of wafers to be dispelled from the carrier through the slides into the linear carrier 30. The annular carrier receiver includes a base portion 16, pivotally mounted as at 17, and an upstanding support 11 connected to a main frame 13 supported by a main pivot 14 through brackets 18 on the base 10. The main frame 13 has detented side clamps 19 for grasping the lateral edges of the base 16 to hold the annular carrier receiver 15 in the position shown in full lines. A handle 19A connected at the opposite end of the base 16 permits disengagement of the base 16 from the detented side clamps 19 and lowering of the receiver 15 into the phantom line position. In that position the annular carrier 12 is loaded on a spindle 20 which is journaled through the base 16 and connected to a ratchet wheel 21, the purpose of which will be explained later.

After the carrier is loaded and the base 16 rotated about the pivot 17 into engagement with the detented side clamps 19 associated with the...