Browse Prior Art Database

Vacuum Evaporation Boat

IP.com Disclosure Number: IPCOM000073460D
Original Publication Date: 1970-Dec-01
Included in the Prior Art Database: 2005-Feb-22
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Related People

Campagna, FJ: AUTHOR [+2]

Abstract

This vacuum evaporation boat is fabricated from laminated multilayer ceramic green sheets. Buried heaters are formed on one of the green sheets to permit heating of the metal to be vacuum deposited after lamination of the green sheets.

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Vacuum Evaporation Boat

This vacuum evaporation boat is fabricated from laminated multilayer ceramic green sheets. Buried heaters are formed on one of the green sheets to permit heating of the metal to be vacuum deposited after lamination of the green sheets.

In A, ordinary alumina green sheets 1-4 are arranged for stacking with sheets 1 and 2 having holes 5 for holding the solder when the sheets are laminated as in
B. Sheet 4 is longer than sheets 1-3 and has a screened high resistance tungsten alumina heater pattern 6 formed on it. Contact terminals 7 are provided at the extensions of this sheet. Composite assembly 8 prevents metal interaction with the source material as the ceramic boat is inert. It is useful for vacuum depositing metals which sublime rather than evaporate, tending to react with the boat material. A nonwetting action allows the source material to ball up when melted to produce a pinpoint source.

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