Browse Prior Art Database

Photosensitive Strip

IP.com Disclosure Number: IPCOM000073506D
Original Publication Date: 1970-Dec-01
Included in the Prior Art Database: 2005-Feb-22
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Rascoe, DW: AUTHOR

Abstract

This device is an improvement of the thin-film thickness measuring device (VAMFO) described in the IBM Journal of Research and Development, January 1964, Vol. 8, No. 1, page 43, "Non-destructive Determination of Thickness and Refractive Index of Transparent Films," by W. A. Pliskin and B. B. Conrad.

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Photosensitive Strip

This device is an improvement of the thin-film thickness measuring device (VAMFO) described in the IBM Journal of Research and Development, January 1964, Vol. 8, No. 1, page 43, "Non-destructive Determination of Thickness and Refractive Index of Transparent Films," by W. A. Pliskin and B. B. Conrad.

Light from light source 1 is reflected from the surface of sample 2 mounted in vacuum chuck 3 which is rigidly mounted on shaft 4 of shaft encoder 5. The light reflected off of sample 2 travels to photosensitive strip 6 which extends circumferentially around the apparatus. The light intensity variations as detected by photosensitive strip 6, when coupled with the output of shaft encoder 5, enable accurate measurement of film thickness without the use of a mechanically coupled photodetector.

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