Browse Prior Art Database

Wafer Holder

IP.com Disclosure Number: IPCOM000073508D
Original Publication Date: 1970-Dec-01
Included in the Prior Art Database: 2005-Feb-22
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Stegner, GO: AUTHOR

Abstract

This device provides a Bernoulli effect pickup head which eliminates wafer backside coverage in spray operations.

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Wafer Holder

This device provides a Bernoulli effect pickup head which eliminates wafer backside coverage in spray operations.

A conventional Bernoulli pickup head 1 is provided with a thin perforated disc 2 rigidly mounted just over the center of the pickup head. Compressed air passing through tube 4 is diverted by disc 2 such that sufficient air passes through aperture 5 in disc 2 to support wafer 3. Excess air passing under disc 2 prevents any liquid being applied to the top surface of wafer 3 from reaching the backside of wafer 3. Guide pins 6 are provided to retain wafers on the head.

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