Browse Prior Art Database

Vacuum Pickup for Wafers

IP.com Disclosure Number: IPCOM000073533D
Original Publication Date: 1970-Dec-01
Included in the Prior Art Database: 2005-Feb-22
Document File: 2 page(s) / 28K

Publishing Venue

IBM

Related People

DeGennaro, S: AUTHOR [+2]

Abstract

Shown is a vacuum pickup or pencil for handling semiconductor wafers. It can be fabricated by cold forming a piece of stainless steel tubing into a loop 1 for facilitating ease in handling by enabling the operator to place it on his index finger, rather than setting it down after each time it is used. Attached to the loop at one end, as by soldering, is a vacuum pencil tip 2 having a relieved flat 3 for contact with the wafers. A plastic hose 4 is attached by a slip fit to the other end of ring 1. At the top of the loop 1 is a slot 5 interconnecting with the interior of the tubing so as to enable a make or break of a vacuum seal by merely applying or releasing thumb pressure at the slot.

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Vacuum Pickup for Wafers

Shown is a vacuum pickup or pencil for handling semiconductor wafers. It can be fabricated by cold forming a piece of stainless steel tubing into a loop 1 for facilitating ease in handling by enabling the operator to place it on his index finger, rather than setting it down after each time it is used. Attached to the loop at one end, as by soldering, is a vacuum pencil tip 2 having a relieved flat 3 for contact with the wafers. A plastic hose 4 is attached by a slip fit to the other end of ring 1. At the top of the loop 1 is a slot 5 interconnecting with the interior of the tubing so as to enable a make or break of a vacuum seal by merely applying or releasing thumb pressure at the slot.

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