Browse Prior Art Database

Mask Cleaning Process

IP.com Disclosure Number: IPCOM000073563D
Original Publication Date: 1971-Jan-01
Included in the Prior Art Database: 2005-Feb-22
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Melvin, GE: AUTHOR [+3]

Abstract

In the fabrication of multilayer ceramic substrates, molybdenum masks and silk screens are used to apply metal paste to each ceramic layer. To obtain proper via hole filling and sharp patterns, the masks and screens must be kept as clean as possible. The apparatus shown employs a process for effectively cleaning masks, screens and the like. Basically, the apparatus comprises two cylindrical chambers 1 and 2 held between clamp sections 3 and 4 and fitted with rubber seals 5 and 6 for sandwiching screen holder apparatus 7, with latter holding screen 8 to be cleaned so as to form air-tight chamber arrangement on each side of the screen. The inlet chamber 1 contains a plurality of nozzles 9 through which solvent or air can be delivered under high pressure.

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Mask Cleaning Process

In the fabrication of multilayer ceramic substrates, molybdenum masks and silk screens are used to apply metal paste to each ceramic layer. To obtain proper via hole filling and sharp patterns, the masks and screens must be kept as clean as possible. The apparatus shown employs a process for effectively cleaning masks, screens and the like. Basically, the apparatus comprises two cylindrical chambers 1 and 2 held between clamp sections 3 and 4 and fitted with rubber seals 5 and 6 for sandwiching screen holder apparatus 7, with latter holding screen 8 to be cleaned so as to form air-tight chamber arrangement on each side of the screen. The inlet chamber 1 contains a plurality of nozzles 9 through which solvent or air can be delivered under high pressure. The outlet chamber 2 serves as the solvent draining portion of the apparatus. Both chambers have separate compressed air purging jets 10 and 11 which are so designed that they cause a swirling motion of the solvent within the chamber to thereby minimize drying time. The process involves alternate pulses of pressurized solvent or air which pass through the inlet nozzles and impinge upon the mask or screen to be cleaned. This loosens the paste which is then swept away by the swirling action of the purging jets, thus leaving a clean dry mask or screen.

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