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Fabricating EuO Films

IP.com Disclosure Number: IPCOM000073685D
Original Publication Date: 1971-Jan-01
Included in the Prior Art Database: 2005-Feb-22
Document File: 2 page(s) / 32K

Publishing Venue

IBM

Related People

Lee, K: AUTHOR [+2]

Abstract

Thermal evaporation has proven to be an adequate technique in fabricating both pure and doped EuO films. In the case of pure EuO films, two sources are required. An electron-beam gun is used to evaporate Eu(2)O(3) and a resistance heated crucible is used simultaneously to evaporate Eu metal in the necessary ratio (unique to the particular vacuum system) to fabricate pure EuO films with bulk properties. The complication in this technique is in handling the highly reactive and chemically unstable Eu metal. In the case of doped EuO films an additional third source is required to thermally evaporate simultaneously the desired dopant. The simultaneous evaporation of three sources in a reproducible manner is both difficult and complex.

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Fabricating EuO Films

Thermal evaporation has proven to be an adequate technique in fabricating both pure and doped EuO films. In the case of pure EuO films, two sources are required. An electron-beam gun is used to evaporate Eu(2)O(3) and a resistance heated crucible is used simultaneously to evaporate Eu metal in the necessary ratio (unique to the particular vacuum system) to fabricate pure EuO films with bulk properties. The complication in this technique is in handling the highly reactive and chemically unstable Eu metal. In the case of doped EuO films an additional third source is required to thermally evaporate simultaneously the desired dopant. The simultaneous evaporation of three sources in a reproducible manner is both difficult and complex. The technique described below pertains to a process for fabricating pure EuO films from Eu(2)O(3) and eliminates the necessity for the Eu metal source. Therefore, the procedure is greatly simplified for fabricating either pure EuO or doped Euo Films.

The process is as follows: A high density (92-98% of theoretical density) Eu(2)O(3) slug is thermally evaporated with an electron-beam gun in an ultrahigh vacuum system. A cylindrical liquid nitrogen (or liquid helium) shroud with a titanium sublimation pump (TSP) is located coaxially with the electron-beam gun and the substrate holder.

The geometry of the liquid nitrogen shroud and the sublimator is quite flexible, the only requirement being a very high pumping speed f...