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Eu(2)O(3) Passive Layer on RF Sputtered EuO Films

IP.com Disclosure Number: IPCOM000073687D
Original Publication Date: 1971-Jan-01
Included in the Prior Art Database: 2005-Feb-22
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Lee, K: AUTHOR [+2]

Abstract

EuO films with bulk properties have been prepared by RF sputtering in an ultrahigh vacuum (UHV) chamber. Since EuO is chemically unstable in air, it is important to deposit a transparent passive layer onto the films, such as an Eu(2)O(3) layer. Described below is the fabrication of an Eu(2)O(3) layer on RF sputtered Eu(2)O(3) films.

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Eu(2)O(3) Passive Layer on RF Sputtered EuO Films

EuO films with bulk properties have been prepared by RF sputtering in an ultrahigh vacuum (UHV) chamber. Since EuO is chemically unstable in air, it is important to deposit a transparent passive layer onto the films, such as an Eu(2)O(3) layer. Described below is the fabrication of an Eu(2)O(3) layer on RF sputtered Eu(2)O(3) films.

An Eu(2)O(3) layer is quite simply deposited onto a thermally evaporated EuO film because Eu(2)O(3) is one of the starting constituents. However, in the preparation by RF sputtering, the starting material or target is polycrystalline EuO. Also because of the requirement for deposition temperatures exceeding 400 degrees C in order to fabricate films with bulk properties, the films are quite susceptible to decomposition immediately after deposition.

A technique for fabricating An Eu(2)O(3) passive layer is as follows: Immediately after deposition, pump out the Ar gas to a pressure of 10/-9/ torr. Concurrently cool the films from 400 degrees C to room temperature at a rate of l5 degrees C/min. During cool down introduce O(2) gas to a pressure not exceeding 10/-7/ torr for about 300 sec. This O(2) reacts with the EuO film to form Eu(2)O(3). Then pump out the chamber to at least 1x10/-9/ torr to remove the O(2) gas. An Eu(2)O(3) passive layer of about 200 to 300 Angstroms is then fabricated and is thin enough so as to not affect the Faraday magneto-optic properties of the EuO film. The Eu(2...