Browse Prior Art Database

Constant Composition Alloy Evaporation Source

IP.com Disclosure Number: IPCOM000073767D
Original Publication Date: 1971-Jan-01
Included in the Prior Art Database: 2005-Feb-23
Document File: 2 page(s) / 39K

Publishing Venue

IBM

Related People

Bertelsen, BI: AUTHOR

Abstract

This vacuum evaporation source provides constant composition alloy deposition by flash evaporation of a melt fed to the evaporation site by capillary action, thus eliminating variable composition deposition caused when a bulk liquid source is used.

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Constant Composition Alloy Evaporation Source

This vacuum evaporation source provides constant composition alloy deposition by flash evaporation of a melt fed to the evaporation site by capillary action, thus eliminating variable composition deposition caused when a bulk liquid source is used.

A graphite heater block 1 provides a heat source for raising the temperature of the prepared alloy to its melting point. The following materials and specifications are suitable for evaporation of alloys which wet but do not react with pyrolytic boron nitride - e.g., high percent Al, AlCu. A pyrolytic boron nitride (BN) crucible 2 holds melt 3. A BN sleeve 4 having an outside diameter approximately 0.01 inch less than the inside diameter of crucible 2 is inserted concentrically in the crucible. Capillary action causes the melt to fill the space between crucible 2 and sleeve 4 providing a uniform composition evaporation surface 5 having the same composition as melt 3. BN radiation shield 6 and RF coils 7 provide a flash evaporation heat source focused at surface 5. The entire melt 3 may be evaporated while maintaining a constant composition of deposition material.

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