Browse Prior Art Database

Centrifugal Lock For Spin Dryers

IP.com Disclosure Number: IPCOM000073818D
Original Publication Date: 1971-Feb-01
Included in the Prior Art Database: 2005-Feb-23
Document File: 2 page(s) / 46K

Publishing Venue

IBM

Related People

Schneider, JC: AUTHOR [+2]

Abstract

In order to keep the lid 5 from rising up, centrifugal locks 1 are added to the spin dryer head 6 used to dry a plurality of semiconductor wafers 7. The locks operate independently. While the dryer is not being used, the locks are designed to be in the vertical open position for easy loading and unloading of wafers. When the system is in operation, as shown in the drawing, and the head spinning at 1,000 RPM, centrifugal force will move the locks into a horizontal position thus locking the lid 5 in position. When the spinning stops, the locks return to the vertical open position.

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Centrifugal Lock For Spin Dryers

In order to keep the lid 5 from rising up, centrifugal locks 1 are added to the spin dryer head 6 used to dry a plurality of semiconductor wafers 7. The locks operate independently. While the dryer is not being used, the locks are designed to be in the vertical open position for easy loading and unloading of wafers. When the system is in operation, as shown in the drawing, and the head spinning at 1,000 RPM, centrifugal force will move the locks into a horizontal position thus locking the lid 5 in position. When the spinning stops, the locks return to the vertical open position.

Each lock 1 comprises a stainless steel eccentrically weighted yoke 2 pivoted on a stainless steel post 3. The yoke is attached to the post by a pin 4. The post 3 is then soldered to a dowel 8 carried by the spin dryer head. A second lock is mounted on a dowel on the head opposite the first dowel. The locks must be within 0.2 gram to have the system balanced. The head does not have to be rebalanced.

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