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Chemical Process Module

IP.com Disclosure Number: IPCOM000073967D
Original Publication Date: 1971-Feb-01
Included in the Prior Art Database: 2005-Feb-23
Document File: 2 page(s) / 54K

Publishing Venue

IBM

Related People

Carl, HP: AUTHOR

Abstract

Chemical process units are employed in a continuous strip metal etch line for production of circuitry components. Raw strip from a supply 10 is degreased and covered with resist, which, after drying, is exposed to art work 12 in a repetitive fashion along the strip 14. The exposed resist is then developed and rinsed to uncover portions of the metal strip. These portions are then chemically etched away and, finally, the resist is stripped and the rinsed and dried product is taken up on a reel 16.

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Chemical Process Module

Chemical process units are employed in a continuous strip metal etch line for production of circuitry components. Raw strip from a supply 10 is degreased and covered with resist, which, after drying, is exposed to art work 12 in a repetitive fashion along the strip 14. The exposed resist is then developed and rinsed to uncover portions of the metal strip. These portions are then chemically etched away and, finally, the resist is stripped and the rinsed and dried product is taken up on a reel 16.

A process line of this kind requires a number of wet process stations 20 which can be in the form of a module having spray process and emersion facilities. Each module 20 has a tank 22 and two chambers 24, 26 having porous stainless steel partitions 28. Partitions 28 may be utilized to provide uniform spray areas when the chamber 24 is in an upper position and fluid is forced into chamber 24 behind partitions 28. For emersion processes the IN-OUT ports are reversed, as in the case of chamber 26. Then the solution enters the chamber at the bottom and leaves through an overflow 30 at its top. By raising or lowering chamber 26, the dwell of emersion can be altered, and if more dwell is needed than can be provided by one module, a number of modules can be supplied in series.

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