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Browse Prior Art Database

Electrical Test Stage

IP.com Disclosure Number: IPCOM000074124D
Original Publication Date: 1971-Mar-01
Included in the Prior Art Database: 2005-Feb-23
Document File: 2 page(s) / 27K

Publishing Venue

IBM

Related People

Beaufrere, P: AUTHOR [+2]

Abstract

When using test devices to evaluate and perform measurements on complex integrated circuits in a scanning electron microscope, it is necessary to be able to contact various portions of the circuit being evaluated, such as pads, lands and open windows in the oxide layer. Accordingly, a plurality of probes are used to contact various portions of the circuit on a semiconductor sample. The sample, not shown, is centrally mounted on base plate 1 on the periphery of which various test devices T are installed. Such test devices may be rotated about an imaginary and mobile axis. Their dimensions are very small so that they can be put into a scanning electron microscope airlock without having to be modified.

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Electrical Test Stage

When using test devices to evaluate and perform measurements on complex integrated circuits in a scanning electron microscope, it is necessary to be able to contact various portions of the circuit being evaluated, such as pads, lands and open windows in the oxide layer. Accordingly, a plurality of probes are used to contact various portions of the circuit on a semiconductor sample. The sample, not shown, is centrally mounted on base plate 1 on the periphery of which various test devices T are installed. Such test devices may be rotated about an imaginary and mobile axis. Their dimensions are very small so that they can be put into a scanning electron microscope airlock without having to be modified.

The test device comprises a movable plate 2 which is pressed against base plate 1 by spring means, not shown. Two adjusting screws 3 and two return springs 4, mounted on fixed parts 5, are used to enable the probe W to move linearly and rotatably over the entire surface of the sample. A screw 6, controlling the rotation of a layer arm about the axis 7, allows the tip of probe W to move vertically. The self-springing action of the probe tip provides suitable pressure against the sample and ensures adequate contact at the tip therewith. Thus, the tip of each probe W is capable of contacting any portion of the sample being tested. The standard mechanisms are simplified without a decrease in performance in order to have a light and compact system. Po...