Browse Prior Art Database

Protective Coating for Masks

IP.com Disclosure Number: IPCOM000074226D
Original Publication Date: 1971-Mar-01
Included in the Prior Art Database: 2005-Feb-23
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Carter, JH: AUTHOR [+4]

Abstract

Masks, such as those used in the contact exposure of photoresist layers are coated with a replaceable protective layer of a resilient, alcohol soluble polyamide.

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Protective Coating for Masks

Masks, such as those used in the contact exposure of photoresist layers are coated with a replaceable protective layer of a resilient, alcohol soluble polyamide.

A mask, having a pattern, for example, of chromium supported on a transparent substrate, is coated with a nylon polyamide, such as is prepared by reacting a dimer or dilinoleic acid with an aliphatic diamine. The polyamide is coated from an isoamyl alcohol solution to produce a smooth, resilient coating which is transparent to exposing radiation. The coating extends mask life by protecting the chromium from wafer spikes, abrasion, and photoresist pickup. The coating is removed by solvents and replaces as necessary.

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