Dismiss
InnovationQ will be updated on Sunday, Oct. 22, from 10am ET - noon. You may experience brief service interruptions during that time.
Browse Prior Art Database

Pyrolytic Graphite for Epitaxial Deposition Susceptors

IP.com Disclosure Number: IPCOM000074231D
Original Publication Date: 1971-Apr-01
Included in the Prior Art Database: 2005-Feb-23
Document File: 2 page(s) / 27K

Publishing Venue

IBM

Related People

Elijah, LM: AUTHOR

Abstract

Three different types of pyrolytic graphite susceptors can be made using the process of pyrolytically depositing graphite. Each susceptor has the advantage of uniformity of temperature and thus uniformity of deposited epitaxial layer thickness. Fully pyrolytic graphite susceptors, are shown in the figure, where layers have been deposited parallel to the outer surface, concentrically, into which recesses 10 for holding wafers are machined. Alternatively, pyrolytic graphite layers are deposited evenly and concentrically upon the outside of a finished machined surface (cylindrical sleeve) of standard susceptors. A pyrolytic graphite layer can also be deposited evenly and concentrically upon silicon dioxide or other suitable inner layer, cylindrical sleeve, into which desired recesses are rough machined.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Pyrolytic Graphite for Epitaxial Deposition Susceptors

Three different types of pyrolytic graphite susceptors can be made using the process of pyrolytically depositing graphite. Each susceptor has the advantage of uniformity of temperature and thus uniformity of deposited epitaxial layer thickness. Fully pyrolytic graphite susceptors, are shown in the figure, where layers have been deposited parallel to the outer surface, concentrically, into which recesses 10 for holding wafers are machined. Alternatively, pyrolytic graphite layers are deposited evenly and concentrically upon the outside of a finished machined surface (cylindrical sleeve) of standard susceptors. A pyrolytic graphite layer can also be deposited evenly and concentrically upon silicon dioxide or other suitable inner layer, cylindrical sleeve, into which desired recesses are rough machined. Then after deposition the outside surface is finish machined.

1

Page 2 of 2

2

[This page contains 1 picture or other non-text object]