Browse Prior Art Database

Semiconductor Insulator Capacitance Measurement

IP.com Disclosure Number: IPCOM000074247D
Original Publication Date: 1971-Apr-01
Included in the Prior Art Database: 2005-Feb-23
Document File: 2 page(s) / 22K

Publishing Venue

IBM

Related People

Noble, WP: AUTHOR

Abstract

This is an improvement of the method for measuring capacitance disclosed in the IBM Technical Disclosure Bulletin, Vol. 13, No. 7, page 1806, December 1970. In this method, a liquid electrolyte is substituted for the mercury disclosed previously.

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Semiconductor Insulator Capacitance Measurement

This is an improvement of the method for measuring capacitance disclosed in the IBM Technical Disclosure Bulletin, Vol. 13, No. 7, page 1806, December 1970. In this method, a liquid electrolyte is substituted for the mercury disclosed previously.

In order to make MIS capacitance measurements across insulator 1 a voltage is applied between liquid electrolyte 2 and semiconductor 3. Electrolyte 2 is locally retained by a nonabsorbent mask or perforated tape 4. For example, 1 molar aqueous solution of KCl may be used as electrolyte 2 when the insulator- semiconductor is SiO(2) - Si.

A liquid electrolyte eliminates the health hazard of mercury, makes measurements more consistent due to the lack of oxide formation found on mercury surfaces and prevents contamination of the insulator surface. The use of tape 4 allows for better definition of the contact area than the surface tension relied on in the mercury contact method.

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