Browse Prior Art Database

Microelectronic Lens

IP.com Disclosure Number: IPCOM000074399D
Original Publication Date: 1971-Apr-01
Included in the Prior Art Database: 2005-Feb-23
Document File: 2 page(s) / 46K

Publishing Venue

IBM

Related People

Tibbetts, RE: AUTHOR [+2]

Abstract

The drawing shows an embodiment of a nine element f/2 lens system for 10X reduction for use in a reduction camera. The lens is used in the fabrication of microcircuits and has an image field diameter of 7.2 millimeters which corresponds to a circuit chip of .200 inches by .200 inches dimension.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 96% of the total text.

Page 1 of 2

Microelectronic Lens

The drawing shows an embodiment of a nine element f/2 lens system for 10X reduction for use in a reduction camera. The lens is used in the fabrication of microcircuits and has an image field diameter of 7.2 millimeters which corresponds to a circuit chip of .200 inches by .200 inches dimension.

The lens system has extremely small astigmatism and distortion and has a uniformity of correction over the chip surface.

Other similar embodiments which provide essentially the same performance can be selected from the following ranges of constructional data. "R" represents radius of curvature, "t" is lens thickness at central axis and "s" is airspace at central axis. The effective focal length "f" is 27.5 millimeters. 1.65 f < + R(1) < 1.95 f .072 f < t(1) < .090 f

4.25 f < + R(2) < 5.20 f .007 f < s(1) < .013 f

0.46 f < + R(3) < 0.53 f .106 f < t(2) < .120 f

1.15 f < + R(4) < 1.28 f .009 f < s(2) < .012 f

0.35 f < + R(5) < 0.37 f .110 f < t(3) < .130 f

2.25 f < + R(6) < 2.35 f .030 f < t(4) < .050 f

0.21 f < + R(7) < 0.22 f .100 f < s(3) < .120 f

+/- 200.0 f < R(8) -/< Infinity .045 f < t(5) < .065 f

2.55 f < + R(9) < 3.20 f .123 f < s(4) < .142 f

0.26 f < - R(10)< 0.27 f .038 f < t(6) < .057 f

0.56 f < - R(11)< 0.61 f .072 f < t(7) < .074 f

0.43 f < - R(12)< 0.45 f .009 f < s(5) < .012 f

0.72 f < - R(13)< 0.81 f .070 f < t(8) < .076 f

0.59 f < - R(14)< 0.65 f .009 f < s(6) < .012 f

0.88 f < + R(15)< 0.98 f .089 f < t(9) < .094 f

1.28 f < - R(16)< 1....