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Thin Film Bimetallic Switch

IP.com Disclosure Number: IPCOM000074650D
Original Publication Date: 1971-May-01
Included in the Prior Art Database: 2005-Feb-23
Document File: 2 page(s) / 27K

Publishing Venue

IBM

Related People

Brown, AV: AUTHOR

Abstract

Shown is a slow, high-voltage, low internal impedance bimetallic switch, the bimetallic strips of which may be fabricated in an integrated fashion on a substrate, using thin-film evaporation techniques. Preliminary to depositing bimetallical strips 1, a pattern of material such as 7070 glass, not shown, is deposited upon substrate 3. Thereafter, the bimetallic strips 1 are vapor deposited upon the glass. In this regard the strips may be sufficiently large so as to allow utilization of evaporation masks to delineate the configuration of the strips. Then, a thin insulator film 5 is deposited upon the bimetallic strips 1 and then a thin-film heater strip 7 is deposited upon the insulator film 5.

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Thin Film Bimetallic Switch

Shown is a slow, high-voltage, low internal impedance bimetallic switch, the bimetallic strips of which may be fabricated in an integrated fashion on a substrate, using thin-film evaporation techniques. Preliminary to depositing bimetallical strips 1, a pattern of material such as 7070 glass, not shown, is deposited upon substrate 3. Thereafter, the bimetallic strips 1 are vapor deposited upon the glass. In this regard the strips may be sufficiently large so as to allow utilization of evaporation masks to delineate the configuration of the strips. Then, a thin insulator film 5 is deposited upon the bimetallic strips 1 and then a thin-film heater strip 7 is deposited upon the insulator film 5. Finally, the 7070 glass or the like is removed leaving the bimetallic strips 1 with associated insulator film 5 and heater film 7, as a cantilever arrangement. A top plate 9, with contact 11, is positioned above the cantilever arrangement so that upon application of power to thin-film heater 7 the cantilever arrangement acts to curl, causing its contact 13 to engage contact 11, thereabove.

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