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Transparent Conductive Films

IP.com Disclosure Number: IPCOM000074653D
Original Publication Date: 1971-May-01
Included in the Prior Art Database: 2005-Feb-23
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Michel, AE: AUTHOR [+2]

Abstract

Transparent conductive electrodes are required in the fabrication of display panels and other device applications for which SnO(2) is extensively used. Although SnO(2) has desirable electrical and optical properties, it has poor etchability and line patterns are not easily made therein with standard photolithographic techniques.

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Transparent Conductive Films

Transparent conductive electrodes are required in the fabrication of display panels and other device applications for which SnO(2) is extensively used. Although SnO(2) has desirable electrical and optical properties, it has poor etchability and line patterns are not easily made therein with standard photolithographic techniques.

ZnO is suggested for transparent conductive electrode applications. The following are the advantages of ZnO:

1) Ease of Fabrication: RF sputtering of ZnO in pure argon at high-substrate temperatures (400-500 degrees C) yields high-conductivity films (sheet resistance, R(S) = 250 ohms/sq. cm.). Further, reduction of R(S) of the films is possible because ZnO films with = 0.3 --/1-- cm. resistivity have been consistently obtained without difficulty, as reported in the literature.

2) Effect of Hydrogen Anneal: Annealing of the as deposited film of ZnO in hydrogen results in reduction of R(S) from 10/6/ ohm/sq. cm. to ~ 200 ohm/sq. cm. The annealing was carried out at 400 degrees C for 30 minutes. Further optimization of hydrogen anneal parameters is expected to yield ZnO(1-x) films with R(S) value less than that of SnO(2), i.e., 60 ohm/sq. cm.

3) Base of Etching of ZnO(1-x): Oxygen deficient and hence high-conductivity ZnO(1-x) films are readily etched by HCl. This is a major advantage of ZnO over SnO(2) for delineation of line patterns through conventional photolithographic techniques.

4) Other Transparent Conduc...