Browse Prior Art Database

Shuttle Load Plate Holder

IP.com Disclosure Number: IPCOM000074749D
Original Publication Date: 1971-Jun-01
Included in the Prior Art Database: 2005-Feb-23
Document File: 2 page(s) / 46K

Publishing Venue

IBM

Related People

Beynnon, DS: AUTHOR [+2]

Abstract

This apparatus allows loading of a photosensitive plate 8, used to make a mask for the production of integrated circuits, into mask making equipment, such as a photorepeater, without removing the apparatus from the photorepeater. It consists of a plate holder 10 and a drawer 12 which moves in and out of plate holder 10 on runners 14. Drawer 12 has an aperture 16 which receives the plate 8. Aperture 16 has an air bladder actuated plate elevator 20 in its bottom. Two spring biasing members 22 are positioned on sides of the aperture 16, and are also air bladder actuated. Air for actuation of the plate elevator 20 and the spring biasing members 22 is provided by lines 24 and 26, respectively.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 77% of the total text.

Page 1 of 2

Shuttle Load Plate Holder

This apparatus allows loading of a photosensitive plate 8, used to make a mask for the production of integrated circuits, into mask making equipment, such as a photorepeater, without removing the apparatus from the photorepeater. It consists of a plate holder 10 and a drawer 12 which moves in and out of plate holder 10 on runners 14. Drawer 12 has an aperture 16 which receives the plate
8. Aperture 16 has an air bladder actuated plate elevator 20 in its bottom. Two spring biasing members 22 are positioned on sides of the aperture 16, and are also air bladder actuated. Air for actuation of the plate elevator 20 and the spring biasing members 22 is provided by lines 24 and 26, respectively.

The plate holder 10 has a vacuum chuck 28 in its top surface 30. Three locating pins 32 are provided adjacent the vacuum chuck 28 and extend down into the interior of the plate holder 10 below the vacuum chuck 28. Channels 34 and 36 in drawer 12 provide clearance for the locating pins 32 when the drawer slides into plate holder 10.

In operation, the plate 8 is positioned in aperture 16. Drawer 12 is pushed into plate holder 10. Air is supplied by line 26 to actuate spring biasing members 22, which bias the plate 8 against locating pins 32. Air is supplied by line 24 to actuate plate elevator 20, which raises plate 8 to vacuum chuck 28. At this point, the plate 8 has been precisely positioned on a photorepeater of which the fixture is a part. Vacuum supp...