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Evaporation Source for the Co Deposition of Materials With Different Vapor Pressures

IP.com Disclosure Number: IPCOM000074780D
Original Publication Date: 1971-Jun-01
Included in the Prior Art Database: 2005-Feb-23
Document File: 2 page(s) / 32K

Publishing Venue

IBM

Related People

Gambino, RJ: AUTHOR

Abstract

A difficult problem in thin-film technology is the deposition of homogenous multicomponent thin films whose constituents have widely different vapor pressures. This problem is especially severe when it is not possible to homogenize the film by diffusion at an elevated temperature. For example, the amorphous chalcogenide semiconductors must be protected from high-temperature excursions to avoid devitrification.

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Evaporation Source for the Co Deposition of Materials With Different Vapor Pressures

A difficult problem in thin-film technology is the deposition of homogenous multicomponent thin films whose constituents have widely different vapor pressures. This problem is especially severe when it is not possible to homogenize the film by diffusion at an elevated temperature. For example, the amorphous chalcogenide semiconductors must be protected from high- temperature excursions to avoid devitrification.

A commonly used technique for the fabrication of multicomponent films is multisource evaporation. The constituents are evaporated from independently heated sources which are arranged so that the evaporation flux from each impinges on a common substrate. In order to control the composition of the film, it is generally necessary to continuously monitor the evaporation flux from each source and to control the temperature of each by a feedback loop from the rate monitor. An evaporation source is provided which makes use of the fact that, in most cases, it is only necessary to control the ratio of the temperatures of the sources in order to control the composition of the film. A simple evaporation source has been designed in such a manner that the ratio of the evaporation temperatures is constant, thus obviating the necessity of an elaborate feedback control system.

The functional dependence of the ratio of two constituents, A and B, in the common evaporation flux from sources...