Browse Prior Art Database

Disposable Sputtering Shield

IP.com Disclosure Number: IPCOM000074818D
Original Publication Date: 1971-Jun-01
Included in the Prior Art Database: 2005-Feb-23
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Related People

Fink, OJ: AUTHOR [+2]

Abstract

Shown is a disposable shield for a sputtering system. It comprises a reusable frame 1, and a disposable shield 2, of flexible material, such as aluminum foil, attached to the frame. The frame may be formed from a rectangular sheet of flexible stainless steel with a locking tab construction 3, to hold it in a cylindrical form when properly shaped. Before bending the frame into shape, a sheet of aluminum foil slightly larger than the frame is placed over the frame with its edges over the frame edges. The frame is then bent and the locking ends of the frame are brought together with the foil on the inside diameter, whereat the frame may be locked forming a lined cylinder as shown.

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Disposable Sputtering Shield

Shown is a disposable shield for a sputtering system. It comprises a reusable frame 1, and a disposable shield 2, of flexible material, such as aluminum foil, attached to the frame. The frame may be formed from a rectangular sheet of flexible stainless steel with a locking tab construction 3, to hold it in a cylindrical form when properly shaped. Before bending the frame into shape, a sheet of aluminum foil slightly larger than the frame is placed over the frame with its edges over the frame edges. The frame is then bent and the locking ends of the frame are brought together with the foil on the inside diameter, whereat the frame may be locked forming a lined cylinder as shown. In this manner, the form becomes a shield on the inside diameter of the frame when the latter is formed in a cylinder forming a disposable shield for use in sputtering systems.

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