Browse Prior Art Database

Low Production Evaporation Al and AlSi Boat

IP.com Disclosure Number: IPCOM000074859D
Original Publication Date: 1971-Jun-01
Included in the Prior Art Database: 2005-Feb-23
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Lewandowski, WF: AUTHOR [+2]

Abstract

An evaporation source or boat is provided to be used in the vacuum evaporation of conductive material, such as aluminum, in the production of electronic circuitry.

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Low Production Evaporation Al and AlSi Boat

An evaporation source or boat is provided to be used in the vacuum evaporation of conductive material, such as aluminum, in the production of electronic circuitry.

A cross section A and a planar view B of the boat is shown. The two primary features of the crucible or boat shown are (a) holes 10 are introduced into the tab 11 of the boat in order to prevent boat fracturing, which has been a problem in prior art boats without the holes; and (b) the molten material, e.g., aluminum or aluminum silicon, being evaporated from the cup 12 is prevented from overflowing the edge of the cup 13 by constructing the cup at this edge with a 30% chamfer 14 which reduces the cross section at edge 13 to cause this edge to be the hot-test portion of the cup. This insures that molten material, which may be creeping up along the side wall of the cup, encounters a high-heat area sufficient to cause evaporation before the material can flow over the top edge of the cup.

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