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Browse Prior Art Database

Protective Coating for Resist Coated Chrome over Glass Masks

IP.com Disclosure Number: IPCOM000074864D
Original Publication Date: 1971-Jun-01
Included in the Prior Art Database: 2005-Feb-23
Document File: 2 page(s) / 31K

Publishing Venue

IBM

Related People

Sybalsky, J: AUTHOR

Abstract

Chrome over glass masks formed by the technique described on page 567, Vol. 11, No. 5 of the October 1968 issue of the IBM Technical Disclosure Bulletin may be reinforced by a transparent covering layer.

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Protective Coating for Resist Coated Chrome over Glass Masks

Chrome over glass masks formed by the technique described on page 567, Vol. 11, No. 5 of the October 1968 issue of the IBM Technical Disclosure Bulletin may be reinforced by a transparent covering layer.

Thus a patterned composite of etched chrome 1 and retained etch-resist 2, which together with glass base 3 forms the ultimate mask object, can be protected by an over-coated layer 4 of silicon dioxide.

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