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Window Mounting for High Vacuum Ellipsometric System

IP.com Disclosure Number: IPCOM000075054D
Original Publication Date: 1971-Jul-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 37K

Publishing Venue

IBM

Related People

Dong, DW: AUTHOR [+2]

Abstract

Strain-free mounting of a glass window to a reaction chamber is provided for ellipsometric observations within the chamber. The window must be strain free or resulting strain birefringence will alter the polarization of light and produce erroneous readings.

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Window Mounting for High Vacuum Ellipsometric System

Strain-free mounting of a glass window to a reaction chamber is provided for ellipsometric observations within the chamber. The window must be strain free or resulting strain birefringence will alter the polarization of light and produce erroneous readings.

A window 1 mounted by a glass-to-metal seal on a cylinder 2 is flexibly mounted on and sealed to a flange 3 by a stainless steel bellows 4. A collar 5 is fixed to the flange 3 by separate bolts, not shown. A flange 6 on the bellows 4 fits loosely into a groove 7 in collar 5 to maintain the window in alignment (i.e., normal to the light beam 8 to within 0.2 degrees), and to prevent any significant deflection of the bellows when pressure is changed inside the system.

Thus, when the flange 3 is bolted down to the outside chamber wall 9 by bolts 10 and nuts 11, essentially no strain can be transmitted through the bellows to the window.

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