Browse Prior Art Database

Increasing Resistance to Electromigration in Thinmetal Films

IP.com Disclosure Number: IPCOM000075074D
Original Publication Date: 1971-Jul-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 51K

Publishing Venue

IBM

Related People

Berenbaum, L: AUTHOR

Abstract

A Method is described for decreasing or eliminating the temperature gradient caused by joule heating in thin-film conductors. The gradient is eliminated by supplying heat to the lands (heat sinks) at the ends of a conductor stripe via a thin-film heater located directly under the lands, but separated from intimate contact with the lands by a thin-insulating layer.

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Increasing Resistance to Electromigration in Thinmetal Films

A Method is described for decreasing or eliminating the temperature gradient caused by joule heating in thin-film conductors. The gradient is eliminated by supplying heat to the lands (heat sinks) at the ends of a conductor stripe via a thin-film heater located directly under the lands, but separated from intimate contact with the lands by a thin-insulating layer.

Degradation of thin-film conductors occurs as a result of the divergence of the atomic flux. There are numerous gradients in the conductor which give rise to the divergencies. In a broad sense, they can be divided into two groups: (1) those which are independent of tine or static; and (2) those which are time- dependent or transient. The gross temperature gradient, dT/dX, which exists as a result of joule heating, and efficient heat sinking at the lands is an example of a static gradient. Localized temperature gradients and gradients due to structure (triple point) are considered transient.

The temperature gradient has been considered, in explaining the long-time or wearout-type failure mode. Structural gradients are consider to be effective during the early stages of stress testing but the final degradation resulting in an open circuit is considered controlled by the gross temperature profile.

The detrimental effects of a temperature gradient across a thin-film conductor are minimized when the temperature gradient is eliminated.

The Drawings...