Browse Prior Art Database

Debris Remover for Silicon Wafer Scribing Machine

IP.com Disclosure Number: IPCOM000075126D
Original Publication Date: 1971-Aug-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 22K

Publishing Venue

IBM

Related People

Chaiken, A: AUTHOR

Abstract

Debris is generated during the scribing operation of a silicon wafer in some processes used in field-effect transistor fabrication. If the debris is not removed, it damages both the scribing machine and the wafer.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 97% of the total text.

Page 1 of 2

Debris Remover for Silicon Wafer Scribing Machine

Debris is generated during the scribing operation of a silicon wafer in some processes used in field-effect transistor fabrication. If the debris is not removed, it damages both the scribing machine and the wafer.

This condition results because, after the first pass of the scriber, silicon flakes and dust accumulate in the groove thus cut, impeding cutting action of the diamond during successive passes in the same groove. Moreover, the impact of the dust by subsequent passes of the diamond tends to chip or flake the edges of the groove. Stringent cleaning processes after the grooves are cut are required, and the dust formed collects on various parts of the scribing machine causing unnecessary wear. The dust can be blown off but this spreads it to parts of the machine, and the larger flakes blown across the wafer surface impinge the delicate circuitry and abrade the surface.

Accordingly, it is desirable to remove the debris from the environment as it is created. In the illustrated apparatus, a chuck 10 holds a wafer 12 being grooved by a scriber 14. A vacuum device attached to the machine has an intake tube 16 having an inlet orifice adjacent the cutting edge of scriber 14. Tube 16 conveys the debris as it is formed to a dust collector jar 18.

This simple apparatus is well adapted to small model shop and pilot line operations, and removes the debris efficiently before it can cause damage.

1

Page 2 of 2

2

[This page...