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Velocity Calibrator for a Scanning Light Spot Tool

IP.com Disclosure Number: IPCOM000075142D
Original Publication Date: 1971-Aug-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 21K

Publishing Venue

IBM

Related People

Philbrick, JW: AUTHOR [+2]

Abstract

Using this scanning light spot apparatus, the depth of the electrical junction beneath the surface in a semiconductor structure can be measured in terms of the length of movement of a microscope stage. The scanning light spot technique determines the junction depth by observing the photoelectric response of a sample, beveled at a shallow angle with respect to the surface as a function of position down the beveled surface. The junction depth itself is then calculated from the stage movement and the bevel angle. It is then necessary to have a method of calibrating the stage movement that is similar to the technique used for measuring the junction depth itself, i.e., a technique which yields a photoresponse as a function of known position.

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Velocity Calibrator for a Scanning Light Spot Tool

Using this scanning light spot apparatus, the depth of the electrical junction beneath the surface in a semiconductor structure can be measured in terms of the length of movement of a microscope stage. The scanning light spot technique determines the junction depth by observing the photoelectric response of a sample, beveled at a shallow angle with respect to the surface as a function of position down the beveled surface. The junction depth itself is then calculated from the stage movement and the bevel angle. It is then necessary to have a method of calibrating the stage movement that is similar to the technique used for measuring the junction depth itself, i.e., a technique which yields a photoresponse as a function of known position.

Such a structure is shown, consisting of a pattern diffused into opposite type material. Electrical contact is made both to the pattern and to the substrate, and the sample is then scanned with the scanning light spot apparatus, yielding a distinctive response every time the light spot crosses the boundary between the two material types. Since these positions can be accurately determined from, e.g., the photolithography used to generate the pattern, the photoresponse of this structure as a function of position can be used to calibrate the scanning light spot apparatus.

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