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Browse Prior Art Database

Long Life Chromium Evaporation Source

IP.com Disclosure Number: IPCOM000075150D
Original Publication Date: 1971-Aug-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 33K

Publishing Venue

IBM

Related People

Beaudouin, PL: AUTHOR [+2]

Abstract

A vacuum evaporant source of chromium is resistant to corrosion.

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Long Life Chromium Evaporation Source

A vacuum evaporant source of chromium is resistant to corrosion.

The evaporant source 1 is similar to that described in U. S. Patent No. 3,313,914. An ingot 2 of high-purity chromium is detachably mounted to base plate 3 by tungsten rod 4. Heater element 5 is in the form of a tantalum sleeve 6 doubled upon itself with inner portion 7 being of somewhat smaller cross-section than outer portion 8. The lower portion of inner portion 7 is connected to a current source at base plate 3 to provide a Joule heating of source 1. Most of the heat is developed in portion 7 with portion 8 serving as a connection leg. A washer 9 is mounted about 1/8" from the bottom of ingot 2. The washer becomes heated to approximately the same temperature of ingot 2, and acts as a shield against chromium vapor which would otherwise deposit on the cooler lower portion of inner portion 7 and rod 4 causing alloying and corrosion.

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