Browse Prior Art Database

Visual Aids for Measurement of Glass Masters Used to Produce Metal Masks

IP.com Disclosure Number: IPCOM000075157D
Original Publication Date: 1971-Aug-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

Benjamin, CE: AUTHOR [+3]

Abstract

For dimensional inspections of a glass photographic master mask 1 used in the fabrication of etched metal masks 2, greater precision and procedure simplification can be achieved by placing special fiducial patterns 3 inside the product image patterns 4. The fiducials segments 5, being unsupported by the rest of the metal mask, fall out during etching and therefore do not appear in the final product geometry.

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Visual Aids for Measurement of Glass Masters Used to Produce Metal Masks

For dimensional inspections of a glass photographic master mask 1 used in the fabrication of etched metal masks 2, greater precision and procedure simplification can be achieved by placing special fiducial patterns 3 inside the product image patterns 4. The fiducials segments 5, being unsupported by the rest of the metal mask, fall out during etching and therefore do not appear in the final product geometry.

Metal masks used in semiconductor device fabrication present specific problems in this regard not encountered with glass device photomasks, where extra fiducial images can be tolerated as part of the product geometry. In addition, these metal mask geometries are frequently all circular, so that establishment of a reference image dimension is more difficult than would be if straight edges were present.

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