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Oriented and Single Crystal Rhenium Films

IP.com Disclosure Number: IPCOM000075180D
Original Publication Date: 1971-Aug-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Sadagopan, V: AUTHOR

Abstract

Rhenium is a very hard, very dense material with excellent wear resistant properties. It has been recognized previously that the hexagonal structure of Rhenium, coupled with its favorable c/a lattice constants ratio is responsible for its superior wear resistance properties.

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Oriented and Single Crystal Rhenium Films

Rhenium is a very hard, very dense material with excellent wear resistant properties. It has been recognized previously that the hexagonal structure of Rhenium, coupled with its favorable c/a lattice constants ratio is responsible for its superior wear resistance properties.

Radio-frequency sputtering conditions are presented for the fabrication of oriented and single-crystal films of Rhenium for wear resistance, electromigration and catalytic applications. Various details of sputtering parameters are given in Table 1.

The hardness, electrical conductivity, etchability, and corrosion resistance of films are comparable to these parameters for bulk Rhenium metal. Further, Rhenium films have been successfully deposited on Si-SiO(2) substrates and have been etched readily with dilute HNO(3) at room temperature.

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