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Fabrication of Grating Optical Waveguide Couplers From a Master

IP.com Disclosure Number: IPCOM000075196D
Original Publication Date: 1971-Aug-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 23K

Publishing Venue

IBM

Related People

Pennington, KS: AUTHOR [+3]

Abstract

This is a method of fabricating optical gratings which may be used to couple laser beams into thin film optical waveguides. The method consists of spreading a film of photoresist on the surface of an optical waveguide. The photoresist is pre-exposed and developed leaving a patch of photoresist 10 on the waveguide 12 which is mounted on a substrate 14, as illustrated. The patch of photoresist may be in the range of 1 to 100 mils wide.

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Fabrication of Grating Optical Waveguide Couplers From a Master

This is a method of fabricating optical gratings which may be used to couple laser beams into thin film optical waveguides. The method consists of spreading a film of photoresist on the surface of an optical waveguide. The photoresist is pre-exposed and developed leaving a patch of photoresist 10 on the waveguide 12 which is mounted on a substrate 14, as illustrated. The patch of photoresist may be in the range of 1 to 100 mils wide.

A master grating 16 is located near the photoresist at a distance less than the width of the patch. A single laser beam illuminates the master grating which diffracts the beam. The diffracted beam and the undiffracted zero-order portion of the beam overlap on the photoresist 10 and produce an interference pattern that is recorded on the photoresist 10. The photoresist is then developed in a conventional manner to produce a grating coupler.

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