Browse Prior Art Database

Wafer Orientator

IP.com Disclosure Number: IPCOM000075319D
Original Publication Date: 1971-Sep-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 38K

Publishing Venue

IBM

Related People

Fox, DD: AUTHOR [+2]

Abstract

Shown is an orientator for a wafer 1 having an orientating notch 2 and a wafer flat 3. The orientator is normally placed at the end of a transport unit, such as an air slide, which conveys wafers one at a time for delivery to the unit for orientation. In the orientator, the wafer 1 floats horizontally on an air film which is introduced through directional air ports formed in the face of the orientor and which communicate with a manifold duct or bore 4 connected to a source of air pressure. The air ports are drilled on an angle to create a directional force upon wafer 1 so as to hold its outside diameter against a rotating motor shaft 6 and a side stop 7, having a flat face 8, for cooperative engagement with wafer flat 3.

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Wafer Orientator

Shown is an orientator for a wafer 1 having an orientating notch 2 and a wafer flat 3. The orientator is normally placed at the end of a transport unit, such as an air slide, which conveys wafers one at a time for delivery to the unit for orientation. In the orientator, the wafer 1 floats horizontally on an air film which is introduced through directional air ports formed in the face of the orientor and which communicate with a manifold duct or bore 4 connected to a source of air pressure. The air ports are drilled on an angle to create a directional force upon wafer 1 so as to hold its outside diameter against a rotating motor shaft 6 and a side stop 7, having a flat face 8, for cooperative engagement with wafer flat 3. When a misorientated wafer 1 contacts the rotating motor shaft 6, the wafer is caused to rotate until the notch 2 makes contact with the rotating motor shaft 6. When the orientating notch 2 in the wafer drops on to the motor shaft, wafer rotation is stopped and the wafer is orientated, which orientation is further facilitated by engagement of wafer flat 3 with the flat face 8 of side stop 7.

In addition, two recessed slots 9A and 9B are provided to facilitate wafer pick up with a vacuum pencil by either a right-hand or left-hand operator. If desired, a reflective type photosensor can be employed to indicate when a wafer has reached the orientator and to call for another wafer when one is removed. Any suitable logic package can be...