Browse Prior Art Database

Wafer Carrier

IP.com Disclosure Number: IPCOM000075324D
Original Publication Date: 1971-Sep-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 35K

Publishing Venue

IBM

Related People

DeGennaro, S: AUTHOR [+3]

Abstract

Shown is a modified chlorotrifluoroethylene (CTFE) wafer carrier with high crystalline structure to obtain high modulus for low distortion at elevated temperatures, and minimum ZST (zero strength-time test) for reduced brittleness. In addition, the polymer is modified for suppression of free fluorosilicate film on semiconductor wafers.

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Wafer Carrier

Shown is a modified chlorotrifluoroethylene (CTFE) wafer carrier with high crystalline structure to obtain high modulus for low distortion at elevated temperatures, and minimum ZST (zero strength-time test) for reduced brittleness. In addition, the polymer is modified for suppression of free fluorosilicate film on semiconductor wafers.

For fabrication of the carrier 6, the basic chlorotrifluorethylene is modified with approximately 0.25% calcium oxide to control free fluorines which otherwise cause the appearance of the indicated fluorosilicate film on semiconductor wafers. The resultant calcium oxide containing polymer is then molded in the wafer configuration shown, which includes a rack profile 1 (with flat bottom and a 40 degrees included angle) for a better exposure to chemicals and for control wafer position within the carrier to provide more efficient handling. The carrier also is formed with angle entrance lead 2 and keyed ends 3 in the form of an offset rib to prevent wrong side up placement when used in processing with automatic equipment. To accommodate for transfer of wafers between one carrier and a second like carrier, a positive transfer line is provided by locating notches 4, designed not to trap liquid in wet process of operations, and locating pins 5 to enable a one plane interlock between the carriers when one carrier is inverted on the other carrier. The carrier is also characterized with a large open bottom for better liquid dis...