Browse Prior Art Database

Wafer Identification

IP.com Disclosure Number: IPCOM000075325D
Original Publication Date: 1971-Sep-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 60K

Publishing Venue

IBM

Related People

Fahrni, RC: AUTHOR [+2]

Abstract

Shown is a system for putting identification indicia on semiconductor wafers during processing, through dicing if desired. Such identification can be employed for recording wafer processing history decision making for personalization, as well as a means to accurately control wafer mixing during device manufacture.

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Wafer Identification

Shown is a system for putting identification indicia on semiconductor wafers during processing, through dicing if desired. Such identification can be employed for recording wafer processing history decision making for personalization, as well as a means to accurately control wafer mixing during device manufacture.

As illustrated in the drawings, the system comprises a base plate holder 1 for a semiconductor mask 2 which is supported on the base plate holder and secured thereto by a spacer cover plate 20. Mounted on spacer plate 20 is a tab holder 3 recessed at 4 to form a seat for the indicia marking scheme 5. The indicia is obtained by a plurality of four or more metal tab slides 5, which are inserted under a retainer 9 and accurately located by a dowel pin 30 (in a tab locating hole 31) so that their character perforated end portions project over the mask 2. The projecting end portions of the tab slides 5 are perforated with etched characters representing arabic or roman letters numerals, in accordance with the identification desired on the wafer. The system can be used for wafer identification by printing of arabic numbers, in any plurality of digits, on wafers during normal processing by simultaneous exposure of the resist coating 33 on the oxidized surface of the wafers as shown in Fig. 1. Since the image of the numbers is projected on to the surface of the resist coated wafer with collimated light simultaneously with the device configur...