Browse Prior Art Database

Wafer Centering Fixture

IP.com Disclosure Number: IPCOM000075366D
Original Publication Date: 1971-Sep-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

DeSantis, DP: AUTHOR [+4]

Abstract

This fixture locates a wafer in the plane by gripping and positioning with four surfaces.

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Wafer Centering Fixture

This fixture locates a wafer in the plane by gripping and positioning with four surfaces.

The fixture shown in A has three linear slides 1, 2, and 3. Affixed to slides 1 and 3 are centering jaws 4 and 5, respectively. Affixed to slide 2 is a locater plate
6. Pedestal 7 supports the wafer to be positioned. Slide 2 and locater plate 6 are spring loaded to pedestal 7. Slides 1 and 3 to which centering jaws 4 and 5 and slide extensions 8 and 9 are affixed, are spring loaded to cam followers 10 which are affixed to pivot arm 11. Linear dashpot 12 is actuated by slide 3. The assembly is rotatably mounted on base 14 by precision bearing 15. To base 14 is mounted a circular locater 16. Two surfaces 20 are supported on slide 1 and one surface 22 supported on slide 3. Surface 21 is adapted to contact the notch of the wafer to provide rotational orientation.

In operation, lever 17 is moved in the direction indicated by the arrow 18 to open the fixture. This is accomplished when slide 1 moves downward, contacting and rotating arm 11 about its pivot point which in turn urges slide 3 upward. The wafer is placed on pedestal 7, lever 17 released and the motion is reversed by a spring in dashpot 12. This results in surfaces 20 and 22 gripping and centering the wafer. Surface 21 contacts the notch and provides rotational orientation.

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