Browse Prior Art Database

Grinding Fixture

IP.com Disclosure Number: IPCOM000075576D
Original Publication Date: 1971-Oct-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 50K

Publishing Venue

IBM

Related People

Remsen, LP: AUTHOR

Abstract

The apparatus of the drawing positions a ceramic wafer 2 for grinding shoulders on the wafer, that provide an accurate reference for later operations of forming circuit devices on the wafer. Wafer 2 is held in spring loaded jaws 3 that are carried on a support 4. The drawing shows the support with its top side 5 down. An opening is provided for viewing the wafer through a microscope, for aligning marks on the wafer to reference positions, before clamping jaws 3 with screws 6. The apparatus is then turned over for the grinding operation on the outer edges 7 of wafer 2. The location of jaws 3 at two opposite corners of the wafer permits moving the wafer in the X and Y-dimensions and rotating the wafer to the reference position.

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Grinding Fixture

The apparatus of the drawing positions a ceramic wafer 2 for grinding shoulders on the wafer, that provide an accurate reference for later operations of forming circuit devices on the wafer. Wafer 2 is held in spring loaded jaws 3 that are carried on a support 4. The drawing shows the support with its top side 5 down. An opening is provided for viewing the wafer through a microscope, for aligning marks on the wafer to reference positions, before clamping jaws 3 with screws 6. The apparatus is then turned over for the grinding operation on the outer edges 7 of wafer 2. The location of jaws 3 at two opposite corners of the wafer permits moving the wafer in the X and Y-dimensions and rotating the wafer to the reference position. When screws 6 are released, the jaws 3 pivot downward in the drawing to open for receiving or releasing the wafer.

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