Browse Prior Art Database

Capsule Opening Tool

IP.com Disclosure Number: IPCOM000075881D
Original Publication Date: 1971-Dec-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 27K

Publishing Venue

IBM

Related People

Brown, LF: AUTHOR [+2]

Abstract

This tool provides for quick opening of evacuated semiconductor diffusion capsules, and avoids the problem of scattering of source particles caused by an in-rush of air into the capsule upon opening.

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Capsule Opening Tool

This tool provides for quick opening of evacuated semiconductor diffusion capsules, and avoids the problem of scattering of source particles caused by an in-rush of air into the capsule upon opening.

The quartz capsule opening tool comprises rough vacuum chamber 10 into which evacuated quartz capsule 12 is loaded. Prior to loading the chamber saw line 14 is created by sawing about 75 percent of the way through the capsule wall. Saw line 14 need only be long enough to guide the subsequent cracking of the capsule. Vacuum chamber 10 is closed by end cap 16 and a vacuum is then drawn in chamber 10 by operating valve 18. Reciprocally mounted bifurcated tool 20 is then placed into saw line 14 and stress applied to capsule 12 either by striking or rotating tool 20, causing capsule 12 to separate along saw line 14. The vacuum in chamber 10 eliminates a pressure differential between the inside of capsule 12 and chamber 10, thereby preventing an in-rush of air into capsule 12 which might tend to scatter the contents of capsule 12 undesirably. Finally, valve 22 is slowly opened to bleed atmospheric air into chamber 10. End cap 16 may then be removed allowing the contents of capsule 12 to be further processed.

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