Browse Prior Art Database

Submicron Lens

IP.com Disclosure Number: IPCOM000075908D
Original Publication Date: 1971-Dec-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 37K

Publishing Venue

IBM

Related People

Tibbetts, JE: AUTHOR [+2]

Abstract

An eight-element lens, as shown in the drawing, is provided for step and repeat operation for projection printing. The lens is designed to be used in the spectral region where polymeric films or photoresist may be used. The lens can produce linewidths better than 0.7 micron without the drawback of an impossibly short depth of focus. The lens is corrected for a wavelength of 2652 angstroms but could easily be rebalanced for 2200 angstroms. The lens has a numerical aperture of 0.318 and a depth of focus of 1.3 microns and is used for a chip size of 0.075 inch by 0.075 inch. The lens has an effective focal length of 34.3 millimeters.

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Submicron Lens

An eight-element lens, as shown in the drawing, is provided for step and repeat operation for projection printing. The lens is designed to be used in the spectral region where polymeric films or photoresist may be used. The lens can produce linewidths better than 0.7 micron without the drawback of an impossibly short depth of focus. The lens is corrected for a wavelength of 2652 angstroms but could easily be rebalanced for 2200 angstroms. The lens has a numerical aperture of 0.318 and a depth of focus of 1.3 microns and is used for a chip size of 0.075 inch by 0.075 inch. The lens has an effective focal length of 34.3 millimeters.

The ranges of constructional data for embodiments of the lens elements are as follows, where R is radius, t is thickness at the center and S is the airspace at the central axis. 1.40f < + R(1) < 1.50f .194f < t(1) < .214f

2.48f < - R(2) < 2.60f .026f < S(1) < .032f

2.02f < - R(3) < 2.10f .096f < t(2) < .108f

22.0 f < + R(4) <26.0 f .026f < S(2) < .032f

.86f < + R(5) < .90f .194f < t(2) < .214f

18.0 f < + R(6) <20.0 f .026f < S(3) < .032f

18.0 f < - R(7) <20.0 f .096f < t(4) < .108f

1.49f < + R(8) < 1.55f .026f < S(4) < .032f

.68f < + R(9) < .72f .141f < t(5) < .151f

1.10f < + R(10)< 1.14f .434f < S(5) < .470f

.44f < + R(11)< .46f .084f < t(1) < .090f

11.0 f < + R(12)<13.5 f .214f < t(7) < .230f

1.22f < - R(13)< 1.28f .36 f < S(7) < .040f

1.64f < - R(14)< 1.70f

.42f < - R(15)< .43f

1.07f < R(16)< 1.09f.

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