Browse Prior Art Database

Silicon Wafer Dicing Head

IP.com Disclosure Number: IPCOM000075934D
Original Publication Date: 1971-Dec-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Shah, AS: AUTHOR

Abstract

Described is a modification which permits increased yield improvement in wafer dicing and increased blade life in the use of the M. P. Hecker et al position cutting head, described on page 1292 in Vol. 13, No. 5 of the IBM Technical Disclosure Bulletin, October 1970. Such increased performance can be obtained by use of the AISI-300 series stainless steels which are characterized with very high-tensile strength and also sharp notch tensile strength, high-compressive yield stress to tensile yield stress ratio, and with minimum directional properties. Typical of these stainless steels is AISI-301, characterized with a tensile strength of 185,000 psi which is fabricated in a blade thickness of 0.002 +/- 0.0001 mils.

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Silicon Wafer Dicing Head

Described is a modification which permits increased yield improvement in wafer dicing and increased blade life in the use of the M. P. Hecker et al position cutting head, described on page 1292 in Vol. 13, No. 5 of the IBM Technical Disclosure Bulletin, October 1970. Such increased performance can be obtained by use of the AISI-300 series stainless steels which are characterized with very high-tensile strength and also sharp notch tensile strength, high-compressive yield stress to tensile yield stress ratio, and with minimum directional properties. Typical of these stainless steels is AISI-301, characterized with a tensile strength of 185,000 psi which is fabricated in a blade thickness of 0.002 +/- 0.0001 mils. The blade is fabricated in an annular configuration from the AISI-301 stainless steel having a minimum hardness of 50Rc, sharp notch tensile strength ratio of 0.9, a tensile yield to stress ratio of
0.8, and a cold reduction of 40% for minimum directional properties.

In mounting on a cutting head, the AISI-301 stainless cutting blades 24 are assembled between precision spacers 26 in a stacked array on hub 28. The hub has inner cylindrical portions 30 and 30' which engage mating outer cylindrical portions on adaptor 20 disposed on spindle 22. The adaptor is tapered to permit the hub to be mounted without jamming during installation or removal. Clamping nut 32 turns into the hub to hold the stacked blades and spacers between the me...