Browse Prior Art Database

Clean Oven

IP.com Disclosure Number: IPCOM000076069D
Original Publication Date: 1972-Jan-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

Mirza, A: AUTHOR [+3]

Abstract

An oven with inner individual chambers and hot-nitrogen gas flow provides for fast recovering time and reduced particle contamination.

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Clean Oven

An oven with inner individual chambers and hot-nitrogen gas flow provides for fast recovering time and reduced particle contamination.

Oven 1 has main chamber 2 with a hot-air circulation system provided by heater 3, motor blower 4, air inlet 5, and exhaust 6. Independent inner product processing chambers 7 have individual insulated doors 8. Nitrogen enters oven 1 through a supply line 9 in which are located gauge 10, flowmeter 11 and pressure regulator 12. The nitrogen is preheated in heat exchangers 13 by the recirculating hot air in chamber 2 and then is brought to a selected controlled temperature in auxiliary heater 14. The nitrogen then flows through chambers 7 and provides a contamination reducing positive pressure, with temperature control within +/- 2 degrees C from chamber-to-chamber.

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