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Stemless Radio Frequency Electrode

IP.com Disclosure Number: IPCOM000076070D
Original Publication Date: 1972-Jan-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 45K

Publishing Venue

IBM

Related People

Holmwood, RA: AUTHOR [+3]

Abstract

Presently used electrodes with stems require extensive shielding inside the vacuum chamber. Large radio-frequency (RF) currents flowing into the shield capacitance, causes losses in the matching network and along the electrode stem. The stemless electrode eliminates backside shielding, minimizing capacitance and substantially lower losses are achieved.

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Stemless Radio Frequency Electrode

Presently used electrodes with stems require extensive shielding inside the vacuum chamber. Large radio-frequency (RF) currents flowing into the shield capacitance, causes losses in the matching network and along the electrode stem. The stemless electrode eliminates backside shielding, minimizing capacitance and substantially lower losses are achieved.

Cylindrical RF electrode 2 is sealed into top plate 6 of vacuum chamber 12 by 0-ring vacuum seals 8 and insulator ring 7. Target 5 is attached to target- electrode interface 4. Electrode 2 is provided with cooling channels 3 and water is introduced through inlet 10 in lid 9 and removed through outlet 11. The portion of electrode 2 above top plate 6 is exposed to the atmosphere.

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