Browse Prior Art Database

Drying Assemblies

IP.com Disclosure Number: IPCOM000076083D
Original Publication Date: 1972-Jan-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 32K

Publishing Venue

IBM

Related People

Hoeg, A: AUTHOR [+3]

Abstract

Shown is a convenient use of a bell jar in conjunction with a hot plate for bench scale drying of wafers.

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Drying Assemblies

Shown is a convenient use of a bell jar in conjunction with a hot plate for bench scale drying of wafers.

In Fig. 1 a bell jar 1 is inverted over a wafer 2 positioned on a hot plate 3, with the interior of the bell evacuated by connection of its outlet 4 to a vacuum source. The sealing of the bell to the hot plate may be formed by pressing the bell against the surface of the hot plate. The vacuum seal can normally be facilitated by fine grinding the bell jar lips 5 and the surface of the hot plate. By controlling the vacuum and the time it is applied the assembly cannot only be applied for drying the wafer 2, but also for out-gassing and/or removal of solvent from coatings, e.g. photoresist which may have been applied on the wafer. Fig. 2 shows the use of the inverted bell in conjunction with the hot plate for maintaining an inert atmosphere, such as nitrogen, from a source about an enclosed substrate. Outflow of the gas from the inverted bell can be facilitated by bonding a porous ring 6 of wire mesh or course fritted glass to the bottom surfaces of the bell jar lips 5.

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