Browse Prior Art Database

Wafer Centering Device

IP.com Disclosure Number: IPCOM000076090D
Original Publication Date: 1972-Jan-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 43K

Publishing Venue

IBM

Related People

Appenzeller, HA: AUTHOR [+2]

Abstract

This centering device centers wafers with a minimum of force by rotating the wafer against a locating pin.

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Wafer Centering Device

This centering device centers wafers with a minimum of force by rotating the wafer against a locating pin.

Cylinder 1 is actuated to push yoke 7. Yoke engagement pins 3, which are pressed into center dogs 4, extend into slots 9 in yoke 7. As yoke 7 moves toward the center of fixture 21, pins 3 rotate centering fingers 4 about their pivot pins 2. Rollers 5, attached to shafts 14 on centering dogs 4, engage wafer 11 and rotate it about wafer notch locator pin 13 until both rollers 5 touch wafer 11 and hold it against pin 13, at which time wafer 11 is centered on pedestal 12. Yoke 7 is guided in a straight line motion by guide pins 8 to insure that both centering fingers 4 move in synchronization. Return spring 6 retracts yoke 7 and fingers 4 when cylinder 1 is deactivated.

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