Browse Prior Art Database

Wafer Notch Orienter

IP.com Disclosure Number: IPCOM000076162D
Original Publication Date: 1972-Jan-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 29K

Publishing Venue

IBM

Related People

Jukich, AR: AUTHOR [+3]

Abstract

This structure positions semiconductor wafers in a process carrier in a fashion to locate the reference notch in a predetermined position with reference to the carrier.

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Wafer Notch Orienter

This structure positions semiconductor wafers in a process carrier in a fashion to locate the reference notch in a predetermined position with reference to the carrier.

A semiconductor wafer 1 having a reference notch 2 is supported in a process carrier 3 by an orienting rod 4. The orienting rod 4 is supported by bearings at both ends and driven by a motor to rotate the wafer, as indicated by the arrow. Rotation of the orienting rod 4 causes the wafer 1 to rotate until rod 4 enters into notch 2. At this point, the wafer is supported by rest member 5. The radius of rod 4 is less than the radius of notch 2. The wafer is disengaged from the orienting rod when the notch is aligned over the rod, due to the support provided by rest member 5.

Fig. 1 is illustrative of the position of wafer 1 prior to orientation and Fig. 2 shows the position of the wafer after orientation.

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