Browse Prior Art Database

Automatic Wafer Loader

IP.com Disclosure Number: IPCOM000076184D
Original Publication Date: 1972-Jan-01
Included in the Prior Art Database: 2005-Feb-24
Document File: 2 page(s) / 27K

Publishing Venue

IBM

Related People

Garnache, RR: AUTHOR

Abstract

This tool provides accurate loading of semiconductor wafers onto carriers and eliminates the need to apply physical contact to the front surface of wafers, to insure uniform heat transfer between wafers and the carrier during processing.

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Automatic Wafer Loader

This tool provides accurate loading of semiconductor wafers onto carriers and eliminates the need to apply physical contact to the front surface of wafers, to insure uniform heat transfer between wafers and the carrier during processing.

The tool, shown in Fig. 1, consists of a pivotable loader paddle 10 supported by a structure, not shown, and capable of being positioned adjacent to a wafer carrier 12. Loader paddle 10, shown in plan view in Fig. 2, comprises a flat plate having two wafer guide pins 14 and a wafer position sensor 16, Paddle 10 also has a system of holes 18 which, when provided with the proper gas flow, allow paddle 10 to act as a Bernoulli pickup head. In operation, a wafer 20 is supplied face down to paddle 10 by an air slide or other article handling device, not shown. Gas flow to holes 18 prevent the front surface of wafer 20 from touching paddle 10. Detection of the presence of wafer 20 by sensor 16, causes paddle 10 to be pivoted into a vertical position pressing wafer 20 against the surface of carrier 12. At this time wafer 20 is supported only by guide pins 14 and sensor 16. After paddle 10 reaches the vertical position a second sensor, not shown, causes paddle 10 to drop slightly vertically leaving wafer 20 supported by bosses 22 on the carrier 12.

At the same time the gas supply is cut off and paddle 10 is returned to the horizontal position to receive another wafer. Wafers may be unloaded by reversing the sequenc...